Inventor
STORM ARNOLDUS JAN
NL3 patents
⚠️ This page may combine multiple inventors who share the name “STORM ARNOLDUS JAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
2 patentsUS10690812B2Jun 23, 2020
Optical element and optical system for EUV lithography, and method for treating such an optical element
ZEISS CARL SMT GMBH1 citations55
US7959310B2Jun 14, 2011
Optical arrangement and EUV lithography device with at least one heated optical element, operating methods, and methods for cleaning as well as for providing an optical element
ZEISS CARL SMT GMBH3 citations54