Inventor

CZAP ALMUT

DE6 patents

⚠️ This page may combine multiple inventors who share the name “CZAP ALMUT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

1 patent

US10039177B2Jul 31, 2018

Source hollow body and EUV plasma light source comprising such a source hollow body

ZEISS CARL SMT GMBH2 citations62

SINGER WOLFGANG

1 patent

US8885141B2Nov 11, 2014

EUV lithography device and method for processing an optical element

SINGER WOLFGANG2 citations59

HEMBACHER STEFAN

1 patent

US9046794B2Jun 2, 2015

Cleaning module, EUV lithography device and method for the cleaning thereof

HEMBACHER STEFAN3 citations57

EHM DIRK HEINRICH

1 patent

US8477285B2Jul 2, 2013

Particle cleaning of optical elements for microlithography

EHM DIRK HEINRICH3 citations54

WERBER ARMIN

1 patent

US9025128B2May 5, 2015

Actuator including magnet for a projection exposure system and projection exposure system including a magnet

WERBER ARMIN0 citations45

ZEISS CARL MEDITEC AG

1 patent

US11678979B2Jun 20, 2023

Eye implant for an accommodative intraocular lens

ZEISS CARL MEDITEC AG0 citations43