Inventor
ORMOND RUSSELL
US3 patents
Patents
3 patentsUS9123651B2Sep 1, 2015
Dense oxide coated component of a plasma processing chamber and method of manufacture thereof
LAM RES CORP6 citations82
US9546432B2Jan 17, 2017
Dense oxide coated component of a plasma processing chamber and method of manufacture thereof
LAM RES CORP3 citations71
US9790582B2Oct 17, 2017
Long lifetime thermal spray coating for etching or deposition chamber application
LAM RES CORP2 citations65