Inventor
PENIGALAPATI DINESH KUMAR
US5 patents
Patents
5 patentsUS9646841B1May 9, 2017
Group III arsenide material smoothing and chemical mechanical planarization processes
IBM2 citations69
US9890300B2Feb 13, 2018
Germanium smoothing and chemical mechanical planarization processes
IBM0 citations49
US9646842B1May 9, 2017
Germanium smoothing and chemical mechanical planarization processes
IBM0 citations49
US10262866B2Apr 16, 2019
Indium phosphide smoothing and chemical mechanical planarization processes
IBM0 citations48
US9916985B2Mar 13, 2018
Indium phosphide smoothing and chemical mechanical planarization processes
IBM0 citations48