P

Inventor

FAN SUSAN S

US7 patents
⚠️ This page may combine multiple inventors who share the name “FAN SUSAN S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

5 patents
US9859212B1Jan 2, 2018

Multi-level air gap formation in dual-damascene structure

IBM4 citations83
US10586733B2Mar 10, 2020

Multi-level air gap formation in dual-damascene structure

IBM1 citations72
US10224239B2Mar 5, 2019

Multi-level air gap formation in dual-damascene structure

IBM3 citations72
US10615255B2Apr 7, 2020

Fin formation for semiconductor device

IBM3 citations71
US10204827B2Feb 12, 2019

Multi-level air gap formation in dual-damascene structure

IBM0 citations51

GLOBALFOUNDRIES INC

1 patent
US9368590B2Jun 14, 2016

Silicon-on-insulator transistor with self-aligned borderless source/drain contacts

GLOBALFOUNDRIES INC7 citations83

FAN SUSAN S

1 patent
US8623730B2Jan 7, 2014

Method for fabricating silicon-on-insulator transistor with self-aligned borderless source/drain contacts

FAN SUSAN S7 citations79