Inventor
MISTUR LESZEK
DE4 patents
Patents
4 patentsUS11075070B2Jul 27, 2021
Monocrystalline semiconductor wafer and method for producing a semiconductor wafer
SILTRONIC AG2 citations70
US9221149B2Dec 29, 2015
Method for polishing semiconductor wafers by means of simultaneous double-side polishing
SILTRONIC AG3 citations57
US11148250B2Oct 19, 2021
Method for dressing polishing pads
SILTRONIC AG0 citations39
US10189142B2Jan 29, 2019
Method for polishing a semiconductor wafer
SILTRONIC AG0 citations34