Inventor

DUTSCHKE VLADIMIR

DE3 patents

Patents

3 patents

US11161217B2Nov 2, 2021

Method for polishing a semiconductor wafer on both sides

SILTRONIC AG0 citations49

US11148250B2Oct 19, 2021

Method for dressing polishing pads

SILTRONIC AG0 citations39

US10189142B2Jan 29, 2019

Method for polishing a semiconductor wafer

SILTRONIC AG0 citations34