Inventor
GRZESKOWIAK JODI
US18 patents
Patents
18 patentsUS10770479B2Sep 8, 2020
Three-dimensional device and method of forming the same
TOKYO ELECTRON LTD20 citations94
US11682559B2Jun 20, 2023
Method to form narrow slot contacts
TOKYO ELECTRON LTD2 citations73
US11342427B2May 24, 2022
3D directed self-assembly for nanostructures
TOKYO ELECTRON LTD2 citations73
US11264274B2Mar 1, 2022
Reverse contact and silicide process for three-dimensional logic devices
TOKYO ELECTRON LTD5 citations73
US12488989B2Dec 2, 2025
Method to form narrow slot contacts
TOKYO ELECTRON LTD0 citations62
US11450562B2Sep 20, 2022
Method of bottom-up metallization in a recessed feature
TOKYO ELECTRON LTD0 citations62
US11393694B2Jul 19, 2022
Method for planarization of organic films
TOKYO ELECTRON LTD0 citations62
US11201051B2Dec 14, 2021
Method for layer by layer growth of conformal films
TOKYO ELECTRON LTD0 citations62
US12099299B2Sep 24, 2024
Method of patterning a substrate using a sidewall spacer etch mask
TOKYO ELECTRON LTD0 citations61
US11782346B2Oct 10, 2023
Method of patterning a substrate using a sidewall spacer etch mask
TOKYO ELECTRON LTD0 citations61
US11322401B2May 3, 2022
Reverse contact and silicide process for three-dimensional semiconductor devices
TOKYO ELECTRON LTD1 citations60
US11417526B2Aug 16, 2022
Multiple patterning processes
TOKYO ELECTRON LTD0 citations52
US12564027B2Feb 24, 2026
Top-down self-alignment of vias in a semiconductor device for sub-22NM pitch metals
TOKYO ELECTRON LTD0 citations51
US11990334B2May 21, 2024
Method for tuning stress transitions of films on a substrate
TOKYO ELECTRON LTD0 citations51
US11841617B2Dec 12, 2023
Method of forming a narrow trench
TOKYO ELECTRON LTD0 citations51
US11656550B2May 23, 2023
Controlling semiconductor film thickness
TOKYO ELECTRON LTD0 citations51
US11335566B2May 17, 2022
Method for planarization of spin-on and CVD-deposited organic films
TOKYO ELECTRON LTD0 citations51
US12451354B2Oct 21, 2025
Double patterning method of patterning a substrate
TOKYO ELECTRON LTD0 citations48