Inventor
HUGERS RONALD FRANCISCUS HERMAN
NL16 patents
⚠️ This page may combine multiple inventors who share the name “HUGERS RONALD FRANCISCUS HERMAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
15 patentsUS7701577B2Apr 20, 2010
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
ASML NETHERLANDS BV70 citations97
US11360396B2Jun 14, 2022
Mode control of photonic crystal fiber based broadband radiation sources
ASML NETHERLANDS BV45 citations95
US7839506B2Nov 23, 2010
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
ASML NETHERLANDS BV7 citations73
US11563298B2Jan 24, 2023
Hollow-core photonic crystal fiber based broadband radiation generator
ASML NETHERLANDS BV3 citations66
US7630070B2Dec 8, 2009
Scatterometer, a lithographic apparatus and a focus analysis method
ASML NETHERLANDS BV2 citations61
US7557934B2Jul 7, 2009
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
ASML NETHERLANDS BV5 citations61
US12050409B2Jul 30, 2024
Assembly for collimating broadband radiation
ASML NETHERLANDS BV0 citations60
US11619887B2Apr 4, 2023
Assembly for collimating broadband radiation
ASML NETHERLANDS BV1 citations60
US11327412B2May 10, 2022
Topography measurement system
ASML NETHERLANDS BV1 citations60
US11275313B2Mar 15, 2022
Metrology apparatus with radiation source having multiple broadband outputs
ASML NETHERLANDS BV0 citations60
US10990021B2Apr 27, 2021
Metrology apparatus with radiation source having multiple broadband outputs
ASML NETHERLANDS BV1 citations60
US12386270B2Aug 12, 2025
Mode control of photonic crystal fiber based broadband radiation sources
ASML NETHERLANDS BV0 citations59
US11687009B2Jun 27, 2023
Mode control of photonic crystal fiber based broadband radiation sources
ASML NETHERLANDS BV0 citations59
US10520824B2Dec 31, 2019
Wavelength combining of multiple source
ASML NETHERLANDS BV1 citations59
US12237639B2Feb 25, 2025
Hollow-core photonic crystal fiber based broadband radiation generator
ASML NETHERLANDS BV0 citations56