Inventor
BOS EDWIN JOHANNES CORNELIS
NL4 patents
Patents
4 patentsUS11360396B2Jun 14, 2022
Mode control of photonic crystal fiber based broadband radiation sources
ASML NETHERLANDS BV45 citations95
US12386270B2Aug 12, 2025
Mode control of photonic crystal fiber based broadband radiation sources
ASML NETHERLANDS BV0 citations59
US11687009B2Jun 27, 2023
Mode control of photonic crystal fiber based broadband radiation sources
ASML NETHERLANDS BV0 citations59
US12242204B2Mar 4, 2025
Substrate support, lithographic apparatus, method for manipulating charge distribution and method for preparing a substrate
ASML NETHERLANDS BV0 citations47