Inventor
PENN THOMAS C
11 patents
⚠️ This page may combine multiple inventors who share the name “PENN THOMAS C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
7 patentsUS4535401AAug 13, 1985
Apparatus and method for providing power from master controller to subcontrollers and data communication therebetween
TEXAS INSTRUMENTS INC158 citations98
US4341592AJul 27, 1982
Method for removing photoresist layer from substrate by ozone treatment
TEXAS INSTRUMENTS INC639 citations98
US5018210AMay 21, 1991
Pattern comparator with substage illumination and polygonal data representation
TEXAS INSTRUMENTS INC100 citations95
US4912487AMar 27, 1990
Laser scanner using focusing acousto-optic device
TEXAS INSTRUMENTS INC72 citations95
US5592211AJan 7, 1997
Laser pattern/inspector with a linearly ramped chirp deflector
TEXAS INSTRUMENTS INC19 citations92
US4296146AOct 20, 1981
Method for removing resist layer from substrate with combustible gas burnoff
TEXAS INSTRUMENTS INC27 citations81
US5024918AJun 18, 1991
Heat activated dry development of photoresist by means of active oxygen atmosphere
TEXAS INSTRUMENTS INC11 citations73