Inventor

CARMINATI ROBERTO

IT63 patents

⚠️ This page may combine multiple inventors who share the name “CARMINATI ROBERTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CARMINATI ROBERTO

ST MICROELECTRONICS SRL

Integrated electronic module for 3D sensing applications, and 3D scanning device including the integrated electronic module

Resonant biaxial MEMS reflector with piezoelectric actuators, and projective MEMS system including the same

Micro-electro-mechanical device with compensation of errors due to disturbance forces, such as quadrature components

Oscillating structure with piezoelectric actuation, system and manufacturing method

Micromechanical structure with biaxial actuation and corresponding MEMS device

Electrostatically driven MEMS device

Resonant MEMS device having a tiltable, piezoelectrically controlled micromirror

Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristics

Biaxial resonant microelectromechanical mirror structure with piezoelectric actuation having improved characteristics

Resonant MEMS device having a tiltable, piezoelectrically controlled structure, in particular a micromirror

Microelectromechanical device having a structure tiltable through an actuation of the piezoelectric type

Wafer level assembly of a MEMS sensor device and related MEMS sensor device

Mirror micromechanical structure and related manufacturing process

Microelectromechanical sensing structure for a capacitive acoustic transducer including an element limiting the oscillations of a membrane, and manufacturing method thereof

MEMS device with piezoelectric actuation, a projective MEMS system including the MEMS device and related control method

Mirror micromechanical structure and related manufacturing process

Microelectromechanical mirror device with compensation of planarity errors

Hermetically sealed MEMS mirror and method of manufacture

Micro-electro-mechanical device with a shock-protected tiltable structure

Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristics

Biaxial resonant microelectromechanical mirror structure with piezoelectric actuation having improved characteristics

Hermetically sealed MEMS mirror and method of manufacture

Micro-electro-mechanical device with a shock-protected tiltable structure

Micromechanical device having a structure tiltable by a quasi-static piezoelectric actuation and having stiffening elements

Integrated electronic module for 3D sensing applications, and 3D scanning device including the integrated electronic module

Process for manufacturing a MEMS micromirror device, and associated device

Micromechanical device having a structure tiltable by a quasi-static piezoelectric actuation

Piezoelectric actuator having a deformation sensor and fabrication method thereof

Process for manufacturing an optical microelectromechanical device having a tiltable structure with an antireflective surface

Process for manufacturing an optical microelectromechanical device having a tiltable structure with an antireflective surface

Mirror micromechanical structure and related manufacturing process

Micro-electro-mechanical device with a movable structure, in particular micromirror, and manufacturing process thereof

Micro-electro-mechanical device with a movable structure, in particular micromirror, and manufacturing process thereof

Projective MEMS device for a picoprojector of the flying spot type and related manufacturing method

Method of processing a wafer for manufacturing an oscillating structure such as a micro-mirror

Process for manufacturing a MEMS micromirror device, and associated device

Micro-electro-mechanical device having tiltable structure, with detection of the position of the tiltable structure

MEMS device including a capacitive pressure sensor and manufacturing process thereof

Resonant biaxial MEMS reflector with elongated piezoelectric actuators, and projective MEMS system including the same

MEMS device including a capacitive pressure sensor and manufacturing process thereof

Resonant biaxial MEMS reflector with piezoelectric actuators, and projective MEMS system including the same

Micro-electro-mechanical device with compensation of errors due to disturbance forces, such as quadrature components

Micro-electro-mechanical device having a tiltable structure, with detection of the position of the tiltable structure

Microelectromechanical mirror device with piezoelectric actuation and optimized size

MEMS mirror device with piezoelectric actuation and manufacturing process thereof

Biaxial microelectromechanical mirror device with piezoelectric actuation

Microelectromechanical mirror device with piezoelectric actuation and improved opening angle

Microelectromechanical device having a structure tiltable by piezoelectric actuation about two rotation axes

ST MICROELECTRONICS RES & DEV LTD

Compact line scan MEMS time of flight system with actuated lens

Compact line scan mems time of flight system with actuated lens