P

Inventor

NAKAYAMA TAKAHITO

JP29 patents
⚠️ This page may combine multiple inventors who share the name “NAKAYAMA TAKAHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NUFLARE TECHNOLOGY INC

16 patents
US9373424B2Jun 21, 2016

Electron beam writing apparatus and electron beam writing method

NUFLARE TECHNOLOGY INC17 citations83
US9236223B2Jan 12, 2016

Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method

NUFLARE TECHNOLOGY INC5 citations83
US8816276B2Aug 26, 2014

Electron beam writing apparatus and electron beam writing method

NUFLARE TECHNOLOGY INC17 citations83
US10930469B2Feb 23, 2021

Charged particle beam writing apparatus and charged particle beam writing method

NUFLARE TECHNOLOGY INC2 citations72
US9824849B2Nov 21, 2017

Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method

NUFLARE TECHNOLOGY INC3 citations72
US11145483B2Oct 12, 2021

Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method

NUFLARE TECHNOLOGY INC0 citations62
US10755893B2Aug 25, 2020

Charged particle beam writing method and charged particle beam writing apparatus

NUFLARE TECHNOLOGY INC1 citations62
US11749491B2Sep 5, 2023

Electron beam writing apparatus and cathode life span prediction method

NUFLARE TECHNOLOGY INC0 citations58
US11756766B2Sep 12, 2023

Charged particle beam writing apparatus and charged particle beam writing method

NUFLARE TECHNOLOGY INC0 citations52
US11037757B2Jun 15, 2021

Charged particle beam writing apparatus and charged particle beam writing method

NUFLARE TECHNOLOGY INC0 citations52
US12046447B2Jul 23, 2024

Multi-charged-particle-beam writing method, multi-charged-particle-beam writing apparatus, and computer-readable recording medium

NUFLARE TECHNOLOGY INC0 citations51
US10192712B2Jan 29, 2019

Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method

NUFLARE TECHNOLOGY INC0 citations51
US8008631B2Aug 30, 2011

Method of acquiring offset deflection amount for shaped beam and lithography apparatus

NUFLARE TECHNOLOGY INC1 citations49
US11658002B2May 23, 2023

Charged particle beam adjustment method, charged particle beam drawing method, and charged particle beam irradiation apparatus

NUFLARE TECHNOLOGY INC0 citations46
US10553396B2Feb 4, 2020

Charged particle beam writing apparatus and charged particle beam writing method

NUFLARE TECHNOLOGY INC0 citations41
US10460902B2Oct 29, 2019

Charged particle beam writing apparatus and method for diagnosing failure of blanking circuit

NUFLARE TECHNOLOGY INC0 citations41

PANASONIC IP MAN CO LTD

8 patents

DAIKIN IND LTD

4 patents

OHTOSHI KENJI

1 patent