P

Inventor

MORITA HIROFUMI

JP48 patents
⚠️ This page may combine multiple inventors who share the name “MORITA HIROFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NUFLARE TECHNOLOGY INC

19 patents
US10998164B2May 4, 2021

Charged particle beam writing apparatus and charged particle beam writing method

NUFLARE TECHNOLOGY INC2 citations73
US10224172B2Mar 5, 2019

Multi-beam optical system adjustment method, and multi-beam exposure apparatus

NUFLARE TECHNOLOGY INC3 citations73
US9916962B2Mar 13, 2018

Multi charged particle beam irradiation apparatus, multi charged particle beam irradiation method, and multi charged particle beam adjustment method

NUFLARE TECHNOLOGY INC2 citations73
US10388488B2Aug 20, 2019

Multi charged particle beam drawing apparatus and multi charged particle beam drawing method

NUFLARE TECHNOLOGY INC2 citations70
US9330881B2May 3, 2016

Blanking device for multi charged particle beams, and multi charged particle beam writing apparatus

NUFLARE TECHNOLOGY INC2 citations63
US12009175B2Jun 11, 2024

Charged particle beam writing apparatus

NUFLARE TECHNOLOGY INC0 citations62
US11355302B2Jun 7, 2022

Multi-beam blanking device and multi-charged-particle-beam writing apparatus

NUFLARE TECHNOLOGY INC0 citations62
US10224171B2Mar 5, 2019

Blanking device for multi charged particle beams, and multi charged particle beam irradiation apparatus

NUFLARE TECHNOLOGY INC1 citations62
US11908659B2Feb 20, 2024

Multi charged particle beam writing apparatus

NUFLARE TECHNOLOGY INC0 citations60
US11804360B2Oct 31, 2023

Multi charged particle beam adjustment method, multi charged particle beam irradiation method, and multi charged particle beam irradiation apparatus

NUFLARE TECHNOLOGY INC0 citations60
US12592360B2Mar 31, 2026

Multi charged particle beam writing method and multi charged particle beam writing apparatus

NUFLARE TECHNOLOGY INC0 citations52
US12406828B2Sep 2, 2025

Optical system adjustment method for multi charged particle beam apparatus and computer readable recording medium

NUFLARE TECHNOLOGY INC0 citations52
US11756766B2Sep 12, 2023

Charged particle beam writing apparatus and charged particle beam writing method

NUFLARE TECHNOLOGY INC0 citations52
US9991086B2Jun 5, 2018

Multi charged particle beam writing method and multi charged particle beam writing apparatus

NUFLARE TECHNOLOGY INC1 citations52
US12580148B2Mar 17, 2026

Multi charged particle beam writing apparatus

NUFLARE TECHNOLOGY INC0 citations51
US11721520B2Aug 8, 2023

Semiconductor device, multi-charged-particle beam writing apparatus, and multi-charged-particle beam exposure apparatus

NUFLARE TECHNOLOGY INC0 citations49
US11217428B2Jan 4, 2022

Multi charged particle beam writing apparatus

NUFLARE TECHNOLOGY INC0 citations48
US10811224B2Oct 20, 2020

Multi-charged-particle beam writing apparatus

NUFLARE TECHNOLOGY INC0 citations42
US9530610B2Dec 27, 2016

Blanking aperture array device for multi-beams, and fabrication method of blanking aperture array device for multi-beams

NUFLARE TECHNOLOGY INC0 citations36

TOSHIBA KK

4 patents

SHIMOKAWA FUSAO

4 patents

HONDA MOTOR CO LTD

4 patents

FUJITSU LTD

3 patents

NIPPON TELEGRAPH & TELEPHONE

3 patents

TOSHIBA ENERGY SYSTEMS & SOLUTIONS CORP

2 patents

IBM

1 patent

MITSUI TAKEDA CHEMICALS INC

1 patent

BRIDGESTONE CORP

1 patent

ISHIKAWAJIMA HARIMA HEAVY IND

1 patent

VOITH PATENT GMBH

1 patent

MITSUI CHEMICALS INC

1 patent

KAJITA YASUYUKI

1 patent

VOITH PAPER PATENT GMBH

1 patent

MORITA HIROFUMI

1 patent