Inventor
MORITA HIROFUMI
JP48 patents
⚠️ This page may combine multiple inventors who share the name “MORITA HIROFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
19 patentsUS10998164B2May 4, 2021
Charged particle beam writing apparatus and charged particle beam writing method
NUFLARE TECHNOLOGY INC2 citations73
US10224172B2Mar 5, 2019
Multi-beam optical system adjustment method, and multi-beam exposure apparatus
NUFLARE TECHNOLOGY INC3 citations73
US9916962B2Mar 13, 2018
Multi charged particle beam irradiation apparatus, multi charged particle beam irradiation method, and multi charged particle beam adjustment method
NUFLARE TECHNOLOGY INC2 citations73
US10388488B2Aug 20, 2019
Multi charged particle beam drawing apparatus and multi charged particle beam drawing method
NUFLARE TECHNOLOGY INC2 citations70
US9330881B2May 3, 2016
Blanking device for multi charged particle beams, and multi charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC2 citations63
US12009175B2Jun 11, 2024
Charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations62
US11355302B2Jun 7, 2022
Multi-beam blanking device and multi-charged-particle-beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations62
US10224171B2Mar 5, 2019
Blanking device for multi charged particle beams, and multi charged particle beam irradiation apparatus
NUFLARE TECHNOLOGY INC1 citations62
US11908659B2Feb 20, 2024
Multi charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations60
US11804360B2Oct 31, 2023
Multi charged particle beam adjustment method, multi charged particle beam irradiation method, and multi charged particle beam irradiation apparatus
NUFLARE TECHNOLOGY INC0 citations60
US12592360B2Mar 31, 2026
Multi charged particle beam writing method and multi charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations52
US12406828B2Sep 2, 2025
Optical system adjustment method for multi charged particle beam apparatus and computer readable recording medium
NUFLARE TECHNOLOGY INC0 citations52
US11756766B2Sep 12, 2023
Charged particle beam writing apparatus and charged particle beam writing method
NUFLARE TECHNOLOGY INC0 citations52
US9991086B2Jun 5, 2018
Multi charged particle beam writing method and multi charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC1 citations52
US12580148B2Mar 17, 2026
Multi charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations51
US11721520B2Aug 8, 2023
Semiconductor device, multi-charged-particle beam writing apparatus, and multi-charged-particle beam exposure apparatus
NUFLARE TECHNOLOGY INC0 citations49
US11217428B2Jan 4, 2022
Multi charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations48
US10811224B2Oct 20, 2020
Multi-charged-particle beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations42
US9530610B2Dec 27, 2016
Blanking aperture array device for multi-beams, and fabrication method of blanking aperture array device for multi-beams
NUFLARE TECHNOLOGY INC0 citations36
TOSHIBA KK
4 patentsSHIMOKAWA FUSAO
4 patentsUS8149489B2Apr 3, 2012
Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
SHIMOKAWA FUSAO10 citations82
US8634121B2Jan 21, 2014
Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
SHIMOKAWA FUSAO0 citations50
US8582189B2Nov 12, 2013
Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
SHIMOKAWA FUSAO0 citations50
US8462410B2Jun 11, 2013
Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
SHIMOKAWA FUSAO0 citations50
HONDA MOTOR CO LTD
4 patentsUS4652719AMar 24, 1987
Workpiece feeding apparatus in seam welding machine
HONDA MOTOR CO LTD15 citations72
US4652718AMar 24, 1987
Workpiece feeding apparatus in seam welding machine
HONDA MOTOR CO LTD10 citations72
US7119895B2Oct 10, 2006
Method of and apparatus for adjusting optical component, and optical unit
HONDA MOTOR CO LTD3 citations60
US7291807B2Nov 6, 2007
TIG welding equipment and TIG welding method
HONDA MOTOR CO LTD2 citations55
FUJITSU LTD
3 patentsUS5872906AFeb 16, 1999
Method and apparatus for taking countermeasure for failure of disk array
FUJITSU LTD63 citations96
US5848229ADec 8, 1998
Fault tolerant disk array system for allocating auxillary disks in place of faulty disks
FUJITSU LTD62 citations96
US6816981B2Nov 9, 2004
Disk array device including a memory with backup power supply and method thereof
FUJITSU LTD18 citations84
NIPPON TELEGRAPH & TELEPHONE
3 patentsUS5041732AAug 20, 1991
Charged particle beam generating apparatus
NIPPON TELEGRAPH & TELEPHONE33 citations92
US4525629AJun 25, 1985
Deflective focusing system for charged particle beam
NIPPON TELEGRAPH & TELEPHONE49 citations92
US7076135B2Jul 11, 2006
Optical module and manufacturing method therefor
NIPPON TELEGRAPH & TELEPHONE24 citations89