Inventor

LEE DO-HAING

KR20 patents

⚠️ This page may combine multiple inventors who share the name “LEE DO-HAING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEE DO-HAING

SAMSUNG ELECTRONICS CO LTD

Ion beam apparatus having plasma sheath controller

Semiconductor device

Methods of manufacturing non-volatile memory devices having insulating layers treated using neutral beam irradiation

Apparatus and method for controlling ion beam

Method of forming patterns of semiconductor device

Integrated circuit device

Semiconductor device and method of fabricating the same

Method of manufacturing integrated circuit device

Integrated circuit device

UNIV SUNGKYUNKWAN

Etching apparatus using neutral beam

3-grid neutral beam source used for etching semiconductor device

Layer-by-layer etching apparatus using neutral beam and method of etching using the same

Neutral beam source having electromagnet used for etching semiconductor device

Layer-by-layer etching apparatus using neutral beam and etching method using the same

LEE DO-HAING

Apparatus and method for processing substrate using neutralized beams including applying a voltage to a substrate support

Apparatus and method for processing substrate using neutralized beams including applying a voltage to a substrate support

UNIV SUNGKYUNKWAN FOUND

Atomic layer deposition apparatus using neutral beam and method of depositing atomic layer using the same

JEONG SOO-YEON

Methods of manufacturing a semiconductor device

LEE DOO-YOUNG

Method of manufacturing semiconductor devices

KEN TOKASHIKI

Method of manufacturing semiconductor device