Inventor

WANG QINGSU

US14 patents

Patents

14 patents

US6532555B1Mar 11, 2003

Method and apparatus for integration of real-time tool data and in-line metrology for fault detection in an advanced process control (APC) framework

ADVANCED MICRO DEVICES INC78 citations98

US6725402B1Apr 20, 2004

Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) framework

ADVANCED MICRO DEVICES INC78 citations97

US6546508B1Apr 8, 2003

Method and apparatus for fault detection of a processing tool in an advanced process control (APC) framework

ADVANCED MICRO DEVICES INC61 citations96

US5859964AJan 12, 1999

System and method for performing real time data acquisition, process modeling and fault detection of wafer fabrication processes

ADVANCED MICRO DEVICES INC423 citations95

US5740429AApr 14, 1998

E10 reporting tool

ADVANCED MICRO DEVICES INC168 citations95

US6268270B1Jul 31, 2001

Lot-to-lot rapid thermal processing (RTP) chamber preheat optimization

ADVANCED MICRO DEVICES INC57 citations93

US6629012B1Sep 30, 2003

Wafer-less qualification of a processing tool

ADVANCED MICRO DEVICES INC29 citations92

US6556959B1Apr 29, 2003

Method and apparatus for updating a manufacturing model based upon fault data relating to processing of semiconductor wafers

ADVANCED MICRO DEVICES INC25 citations92

US5914879AJun 22, 1999

System and method for calculating cluster tool performance metrics using a weighted configuration matrix

ADVANCED MICRO DEVICES INC74 citations91

US6697691B1Feb 24, 2004

Method and apparatus for fault model analysis in manufacturing tools

ADVANCED MICRO DEVICES INC18 citations83

US6968303B1Nov 22, 2005

Automated system for extracting and combining tool trace data and wafer electrical test (WET) data for semiconductor processing

ADVANCED MICRO DEVICES INC7 citations74

US6556882B1Apr 29, 2003

Method and apparatus for generating real-time data from static files

ADVANCED MICRO DEVICES INC10 citations74

US6324341B1Nov 27, 2001

Lot-to-lot rapid thermal processing (RTP) chamber preheat optimization

ADVANCED MICRO DEVICES INC6 citations62

US6738731B1May 18, 2004

Method and apparatus for using tool state information to identify faulty wafers

ADVANCED MICRO DEVICES INC6 citations57