Inventor

CAMPBELL W JARRETT

US5 patents

⚠️ This page may combine multiple inventors who share the name “CAMPBELL W JARRETT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADVANCED MICRO DEVICES INC

3 patents

US6276989B1Aug 21, 2001

Method and apparatus for controlling within-wafer uniformity in chemical mechanical polishing

ADVANCED MICRO DEVICES INC56 citations95

US6629012B1Sep 30, 2003

Wafer-less qualification of a processing tool

ADVANCED MICRO DEVICES INC29 citations92

US6348289B1Feb 19, 2002

System and method for controlling polysilicon feature critical dimension during processing

ADVANCED MICRO DEVICES INC8 citations70

YIELD DYNAMICS INC

2 patents

US6718224B2Apr 6, 2004

System and method for estimating error in a manufacturing process

YIELD DYNAMICS INC28 citations84

US6643596B2Nov 4, 2003

System and method for controlling critical dimension in a semiconductor manufacturing process

YIELD DYNAMICS INC18 citations75