Inventor
LIN WARREN
US14 patents
⚠️ This page may combine multiple inventors who share the name “LIN WARREN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GEN SCANNING INC
4 patentsUS6366357B1Apr 2, 2002
Method and system for high speed measuring of microscopic targets
GEN SCANNING INC50 citations96
US6249347B1Jun 19, 2001
Method and system for high speed measuring of microscopic targets
GEN SCANNING INC58 citations96
US6181425B1Jan 30, 2001
Method and system for high speed measuring of microscopic targets
GEN SCANNING INC29 citations96
US6177998B1Jan 23, 2001
Method and system for high speed measuring of microscopic targets
GEN SCANNING INC46 citations96
SPEEDFAM CORP
3 patentsUS5872633AFeb 16, 1999
Methods and apparatus for detecting removal of thin film layers during planarization
SPEEDFAM CORP390 citations98
US5733171AMar 31, 1998
Apparatus for the in-process detection of workpieces in a CMP environment
SPEEDFAM CORP71 citations95
US5823853AOct 20, 1998
Apparatus for the in-process detection of workpieces with a monochromatic light source
SPEEDFAM CORP36 citations92