Inventor
MIHALOV MIHAIL
US3 patents
Patents
3 patentsUS7742889B2Jun 22, 2010
Designing an optical metrology system optimized with signal criteria
TOKYO ELECTRON LTD9 citations82
US7734437B2Jun 8, 2010
Apparatus for designing an optical metrology system optimized with signal criteria
TOKYO ELECTRON LTD12 citations82
US7589845B1Sep 15, 2009
Process control using an optical metrology system optimized with signal criteria
TOKYO ELECTRON LTD16 citations82