Inventor

WALLOW THOMAS INGOLF

US5 patents

⚠️ This page may combine multiple inventors who share the name “WALLOW THOMAS INGOLF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LUCENT TECHNOLOGIES INC

3 patents

US5843624ADec 1, 1998

Energy-sensitive resist material and a process for device fabrication using an energy-sensitive resist material

LUCENT TECHNOLOGIES INC310 citations98

US5879857AMar 9, 1999

Energy-sensitive resist material and a process for device fabrication using an energy-sensitive resist material

LUCENT TECHNOLOGIES INC28 citations92

US5998099ADec 7, 1999

Energy-sensitive resist material and a process for device fabrication using an energy-sensitive resist material

LUCENT TECHNOLOGIES INC38 citations91

KIM RYOUNG-HAN

1 patent

US8236592B2Aug 7, 2012

Method of forming semiconductor device

KIM RYOUNG-HAN2 citations55

WALLOW THOMAS INGOLF

1 patent

US8815748B2Aug 26, 2014

Method of forming semiconductor device with multiple level patterning

WALLOW THOMAS INGOLF0 citations41