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Inventor
THOLLOT REMI
FR
2 patents
⚠️ This page may combine multiple inventors who share the name “THOLLOT REMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GODOT ERWAN
1 patent
US8898930B2
Dec 2, 2014
Method for treating a transport support for the conveyance and atmospheric storage of semiconductor substrates, and treatment station for the implementation of such a method
GODOT ERWAN
11 citations
75
CIT ALCATEL
1 patent
US7790479B2
Sep 7, 2010
Method and device for monitoring the contamination of substrate wafers
CIT ALCATEL
5 citations
57