Inventor
BEVAN MALCOLM J
US43 patents
⚠️ This page may combine multiple inventors who share the name “BEVAN MALCOLM J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
18 patentsUS6919251B2Jul 19, 2005
Gate dielectric and method
TEXAS INSTRUMENTS INC32 citations93
US6806149B2Oct 19, 2004
Sidewall processes using alkylsilane precursors for MOS transistor fabrication
TEXAS INSTRUMENTS INC22 citations93
US7423326B2Sep 9, 2008
Integrated circuits with composite gate dielectric
TEXAS INSTRUMENTS INC11 citations84
US7906441B2Mar 15, 2011
System and method for mitigating oxide growth in a gate dielectric
TEXAS INSTRUMENTS INC6 citations74
US6921703B2Jul 26, 2005
System and method for mitigating oxide growth in a gate dielectric
TEXAS INSTRUMENTS INC10 citations74
US7049242B2May 23, 2006
Post high voltage gate dielectric pattern plasma surface treatment
TEXAS INSTRUMENTS INC6 citations73
US7018925B2Mar 28, 2006
Post high voltage gate oxide pattern high-vacuum outgas surface treatment
TEXAS INSTRUMENTS INC6 citations73
US7339240B2Mar 4, 2008
Dual-gate integrated circuit semiconductor device
TEXAS INSTRUMENTS INC2 citations62
US7682988B2Mar 23, 2010
Thermal treatment of nitrided oxide to improve negative bias thermal instability
TEXAS INSTRUMENTS INC2 citations59
US10068771B2Sep 4, 2018
System and method for mitigating oxide growth in a gate dielectric
TEXAS INSTRUMENTS INC0 citations52
US9892927B2Feb 13, 2018
System and method for mitigating oxide growth in a gate dielectric
TEXAS INSTRUMENTS INC0 citations52
US9779946B2Oct 3, 2017
System and method for mitigating oxide growth in a gate dielectric
TEXAS INSTRUMENTS INC0 citations52
US9576804B2Feb 21, 2017
System and method for mitigating oxide growth in a gate dielectric
TEXAS INSTRUMENTS INC0 citations52
US9396951B2Jul 19, 2016
System and method for mitigating oxide growth in a gate dielectric
TEXAS INSTRUMENTS INC0 citations52
US9368355B2Jun 14, 2016
System and method for mitigating oxide growth in a gate dielectric
TEXAS INSTRUMENTS INC0 citations52
US9337044B2May 10, 2016
System and method for mitigating oxide growth in a gate dielectric
TEXAS INSTRUMENTS INC0 citations52
US9337046B1May 10, 2016
System and method for mitigating oxide growth in a gate dielectric
TEXAS INSTRUMENTS INC0 citations52
US7402524B2Jul 22, 2008
Post high voltage gate oxide pattern high-vacuum outgas surface treatment
TEXAS INSTRUMENTS INC0 citations51
APPLIED MATERIALS INC
13 patentsUSD1034491SJul 9, 2024
Edge ring
APPLIED MATERIALS INC17 citations92
US9023700B2May 5, 2015
Method and apparatus for single step selective nitridation
APPLIED MATERIALS INC5 citations83
US11581408B2Feb 14, 2023
Method and apparatus for selective nitridation process
APPLIED MATERIALS INC1 citations72
US11380575B2Jul 5, 2022
Film thickness uniformity improvement using edge ring and bias electrode geometry
APPLIED MATERIALS INC2 citations71
US10872763B2Dec 22, 2020
Treatments to enhance material structures
APPLIED MATERIALS INC5 citations71
US12487121B2Dec 2, 2025
Methods for calibrating an optical emission spectrometer
APPLIED MATERIALS INC0 citations62
US11927482B2Mar 12, 2024
Methods for calibrating an optical emission spectrometer
APPLIED MATERIALS INC0 citations62
US11923441B2Mar 5, 2024
Gate all around I/O engineering
APPLIED MATERIALS INC0 citations62
US11456178B2Sep 27, 2022
Gate interface engineering with doped layer
APPLIED MATERIALS INC0 citations62
US11450759B2Sep 20, 2022
Gate all around I/O engineering
APPLIED MATERIALS INC0 citations62
US12266560B2Apr 1, 2025
Film thickness uniformity improvement using edge ring and bias electrode geometry
APPLIED MATERIALS INC0 citations61
US11271097B2Mar 8, 2022
Cap oxidation for FinFET formation
APPLIED MATERIALS INC0 citations60
US12575357B2Mar 10, 2026
Integrated wet clean for gate stack development
APPLIED MATERIALS INC0 citations52
BEVAN MALCOLM J
3 patentsUS9177806B2Nov 3, 2015
System and method for mitigating oxide growth in a gate dielectric
BEVAN MALCOLM J6 citations83
US8481433B2Jul 9, 2013
Methods and apparatus for forming nitrogen-containing layers
BEVAN MALCOLM J6 citations82
US8546273B2Oct 1, 2013
Methods and apparatus for forming nitrogen-containing layers
BEVAN MALCOLM J3 citations61