Inventor

WALTER AXEL

DE5 patents

⚠️ This page may combine multiple inventors who share the name “WALTER AXEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

1 patent

US6284149B1Sep 4, 2001

High-density plasma etching of carbon-based low-k materials in a integrated circuit

APPLIED MATERIALS INC513 citations97

IMB INST FUER MOLEKULARE BIOTE

1 patent

US7137734B2Nov 21, 2006

Device for measuring quantities of heat while simultaneously measuring the evaporation kinetics and/or condensation kinetics of the most minute amounts of liquid in order to determine thermodynamic parameters

IMB INST FUER MOLEKULARE BIOTE7 citations62

WALTER AXEL

1 patent

US8450206B2May 28, 2013

Method of forming a semiconductor device including a stress buffer material formed above a low-k metallization system

WALTER AXEL3 citations55

GLOBALFOUNDRIES INC

1 patent

US9324631B2Apr 26, 2016

Semiconductor device including a stress buffer material formed above a low-k metallization system

GLOBALFOUNDRIES INC1 citations50

BSH HAUSGERAETE GMBH

1 patent

US10386104B2Aug 20, 2019

Domestic refrigeration device with a coolant circuit, and method for operating a domestic refrigeration device with a coolant circuit

BSH HAUSGERAETE GMBH0 citations36