Inventor
HOLZ MARKUS
DE16 patents
⚠️ This page may combine multiple inventors who share the name “HOLZ MARKUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
12 patentsUS10261424B2Apr 16, 2019
Lithography apparatus and method for operating a lithography apparatus
ZEISS CARL SMT GMBH2 citations71
US10838307B2Nov 17, 2020
Apparatus and method for operating an apparatus
ZEISS CARL SMT GMBH2 citations70
US10514608B2Dec 24, 2019
Method for producing an illumination system for an EUV projection exposure system, and illumination system
ZEISS CARL SMT GMBH4 citations68
US9851555B2Dec 26, 2017
Optical component
ZEISS CARL SMT GMBH3 citations68
US10678151B2Jun 9, 2020
Control device
ZEISS CARL SMT GMBH4 citations66
US11048172B2Jun 29, 2021
Method for producing an illumination system for an EUV projection exposure system, and illumination system
ZEISS CARL SMT GMBH0 citations58
US11789367B2Oct 17, 2023
Facet mirror for an illumination optical unit of a projection exposure apparatus
ZEISS CARL SMT GMBH0 citations47
US10018803B2Jul 10, 2018
Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangement
ZEISS CARL SMT GMBH0 citations47
US10101507B2Oct 16, 2018
Mirror device
ZEISS CARL SMT GMBH1 citations46
US10007195B2Jun 26, 2018
Device for determining a tilt angle of at least one mirror of a lithography system, and method
ZEISS CARL SMT GMBH0 citations45
US12164102B2Dec 10, 2024
Method for generating a mathematical model for positioning individual mirrors of a facet mirror in an optical system
ZEISS CARL SMT GMBH0 citations44
US10514619B2Dec 24, 2019
Sensor arrangement for a lithography system, lithography system, and method for operating a lithography system
ZEISS CARL SMT GMBH0 citations39
ALD VACUUM TECHN GMBH
4 patentsUS11370020B2Jun 28, 2022
Levitation melting process
ALD VACUUM TECHN GMBH1 citations58
US11102850B1Aug 24, 2021
Device and method for levitation melting using induction units which are arranged in a tilted manner
ALD VACUUM TECHN GMBH0 citations55
US10843259B2Nov 24, 2020
Casting method
ALD VACUUM TECHN GMBH0 citations48
US9721690B2Aug 1, 2017
Melting device for consolidating contaminated scrap
ALD VACUUM TECHN GMBH0 citations38