Inventor
TODA SATOSHI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “TODA SATOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS10460949B2Oct 29, 2019
Substrate processing apparatus, substrate processing method and storage medium
TOKYO ELECTRON LTD2 citations71
US10256107B2Apr 9, 2019
Substrate processing method
TOKYO ELECTRON LTD2 citations69
US9691631B2Jun 27, 2017
Etching method and storage medium
TOKYO ELECTRON LTD2 citations68
US9490151B2Nov 8, 2016
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD3 citations68
US12283489B2Apr 22, 2025
Etching method and etching apparatus
TOKYO ELECTRON LTD0 citations60
US11335567B2May 17, 2022
Etching method and etching apparatus
TOKYO ELECTRON LTD0 citations59
US11127597B2Sep 21, 2021
Etching method
TOKYO ELECTRON LTD0 citations51
US9646848B2May 9, 2017
Etching method, etching apparatus and storage medium
TOKYO ELECTRON LTD1 citations51
US12215417B2Feb 4, 2025
Substrate processing method and substrate processing device
TOKYO ELECTRON LTD0 citations50
US11764070B2Sep 19, 2023
Etching method and etching apparatus
TOKYO ELECTRON LTD0 citations49