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Inventor
KAPOSI TOBIAS
DE
2 patents
Patents
2 patents
US11264226B2
Mar 1, 2022
Partly sealed ion guide and ion beam deposition system
UNIV MUENCHEN TECH
0 citations
56
US11222777B2
Jan 11, 2022
Ion guide comprising electrode wires and ion beam deposition system
UNIV MUENCHEN TECH
0 citations
56