Inventor
NAKIBO{HACEK OVER (G)}LU GÜNEŞ
NL3 patents
Patents
3 patentsUS10495986B2Dec 3, 2019
Patterning device cooling system and method of thermally conditioning a patterning device
ASML NETHERLANDS BV1 citations60
US10948825B2Mar 16, 2021
Method for removing photosensitive material on a substrate
ASML NETHERLANDS BV1 citations57
US11320751B2May 3, 2022
Apparatus incorporating a gas lock
ASML NETHERLANDS BV0 citations53