Inventor

HEMSCHOOTE DRIES VAAST PAUL

BE3 patents

Patents

3 patents

US10747127B2Aug 18, 2020

Lithographic apparatus

ASML NETHERLANDS BV5 citations68

US11681233B2Jun 20, 2023

Gas mixing for fast temperature control of a cooling hood

ASML NETHERLANDS BV0 citations53

US11320751B2May 3, 2022

Apparatus incorporating a gas lock

ASML NETHERLANDS BV0 citations53