Inventor
SCHULZ BERND
DE21 patents
⚠️ This page may combine multiple inventors who share the name “SCHULZ BERND”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED MICRO DEVICES INC
7 patentsUS7099010B2Aug 29, 2006
Two-dimensional structure for determining an overlay accuracy by means of scatterometry
ADVANCED MICRO DEVICES INC20 citations92
US6767680B2Jul 27, 2004
Semiconductor structure and method for determining critical dimensions and overlay error
ADVANCED MICRO DEVICES INC41 citations92
US7842442B2Nov 30, 2010
Method and system for reducing overlay errors within exposure fields by APC control strategies
ADVANCED MICRO DEVICES INC23 citations89
US6795193B2Sep 21, 2004
Scatterometer including an internal calibration system
ADVANCED MICRO DEVICES INC18 citations84
US6724096B2Apr 20, 2004
Die corner alignment structure
ADVANCED MICRO DEVICES INC14 citations83
US6765282B2Jul 20, 2004
Semiconductor structure and method for determining critical dimensions and overlay error
ADVANCED MICRO DEVICES INC11 citations73
US6816252B2Nov 9, 2004
Apparatus for determining an overlay error and critical dimensions in a semiconductor structure by means of scatterometry
ADVANCED MICRO DEVICES INC5 citations62