Inventor

TAKEYAMA TAMAKI

JP4 patents

Patents

4 patents

US11081322B2Aug 3, 2021

Film forming apparatus, cleaning method for film forming apparatus and recording medium

TOKYO ELECTRON LTD5 citations70

US11939665B2Mar 26, 2024

Film thickness measuring apparatus and film thickness measuring method, and film forming system and film forming method

TOKYO ELECTRON LTD1 citations59

US7582571B2Sep 1, 2009

Substrate processing method and recording medium

TOKYO ELECTRON LTD2 citations56

US12392026B2Aug 19, 2025

Method and device for substrate processing

TOKYO ELECTRON LTD0 citations47