Inventor
TODO SOYA
US3 patents
Patents
3 patentsUS12548744B2Feb 10, 2026
Plasma processing apparatus, control method, and storage medium for suppressing deterioration effects from wear of an edge ring
TOKYO ELECTRON LTD0 citations57
US12562352B2Feb 24, 2026
Prediction method and information processing apparatus for predicting the process result in a plasma etching process
TOKYO ELECTRON LTD0 citations56
US12573592B2Mar 10, 2026
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations38