Inventor
MAYER HERBERT E
LI14 patents
⚠️ This page may combine multiple inventors who share the name “MAYER HERBERT E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CENSOR PATENT VERSUCH
10 patentsUS4432635AFeb 21, 1984
Temperature-controlled support for semiconductor wafer
CENSOR PATENT VERSUCH48 citations95
US4355892AOct 26, 1982
Method for the projection printing
CENSOR PATENT VERSUCH58 citations95
US4269505AMay 26, 1981
Device for the projection printing of the masks of a mask set onto a semiconductor substrate
CENSOR PATENT VERSUCH23 citations81
US4496241AJan 29, 1985
Process and device for relatively aligning the image and object surfaces in optical copying systems
CENSOR PATENT VERSUCH12 citations73
US4473292ASep 25, 1984
Dampening system
CENSOR PATENT VERSUCH11 citations73
US4461567AJul 24, 1984
Method of and apparatus for the positioning of disk-shaped workpieces, particularly semiconductor wafers
CENSOR PATENT VERSUCH13 citations73
US4405229ASep 20, 1983
Method of projecting printing on semiconductor substrate and workpiece including such substrate
CENSOR PATENT VERSUCH9 citations73
US4376581AMar 15, 1983
Method of positioning disk-shaped workpieces, preferably semiconductor wafers
CENSOR PATENT VERSUCH15 citations73
US4270649AJun 2, 1981
Method for controlling operating processes
CENSOR PATENT VERSUCH15 citations73
US4357100ANov 2, 1982
Arrangement for projection copying masks on to a work piece
CENSOR PATENT VERSUCH16 citations72