Inventor
MATSUYAMA TAKAYOSHI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “MATSUYAMA TAKAYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
6 patentsUS4669123AMay 26, 1987
Inspecting method and apparatus for photomask pattern
FUJITSU LTD29 citations92
US6064484AMay 16, 2000
Pattern inspection method and system
FUJITSU LTD40 citations89
US5900941AMay 4, 1999
High speed pattern inspection method and system
FUJITSU LTD21 citations88
US4701859AOct 20, 1987
Inspecting method and apparatus for a photomask pattern
FUJITSU LTD22 citations81
US6327379B2Dec 4, 2001
Pattern inspection method and apparatus
FUJITSU LTD12 citations71
US6603875B1Aug 5, 2003
Pattern inspection method, pattern inspection apparatus, and recording medium which records pattern inspection program
FUJITSU LTD11 citations65