Inventor
MALONEY GERARD S
US4 patents
⚠️ This page may combine multiple inventors who share the name “MALONEY GERARD S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI MATERIALS CORP
2 patentsUS6231428B1May 15, 2001
Chemical mechanical polishing head assembly having floating wafer carrier and retaining ring
MITSUBISHI MATERIALS CORP85 citations95
US6368189B1Apr 9, 2002
Apparatus and method for chemical-mechanical polishing (CMP) head having direct pneumatic wafer polishing pressure
MITSUBISHI MATERIALS CORP75 citations94
EBARA CORP
2 patentsUS7029382B2Apr 18, 2006
Apparatus for chemical-mechanical polishing (CMP) head having direct pneumatic wafer polishing pressure
EBARA CORP17 citations89
US7311586B2Dec 25, 2007
Apparatus and method for chemical-mechanical polishing (CMP) head having direct pneumatic wafer polishing pressure
EBARA CORP13 citations81