Inventor

VELLA ERIC

US4 patents

⚠️ This page may combine multiple inventors who share the name “VELLA ERIC”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

2 patents

US9875534B2Jan 23, 2018

Techniques and systems for model-based critical dimension measurements

KLA TENCOR CORP3 citations71

US11131629B2Sep 28, 2021

Apparatus and methods for measuring phase and amplitude of light through a layer

KLA TENCOR CORP3 citations68

KLA TENCOR TECHNOLOGIES

1 patent

US6775051B2Aug 10, 2004

Systems and methods for scanning a beam of light across a specimen

KLA TENCOR TECHNOLOGIES16 citations82

KLA CORP

1 patent

US12092814B2Sep 17, 2024

Correcting aberration and apodization of an optical system using correction plates

KLA CORP0 citations57