Inventor
LISI ANTHONY D
US10 patents
⚠️ This page may combine multiple inventors who share the name “LISI ANTHONY D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CLEVENGER LAWRENCE A
5 patentsUS8241992B2Aug 14, 2012
Method for air gap interconnect integration using photo-patternable low k material
CLEVENGER LAWRENCE A422 citations98
US8642252B2Feb 4, 2014
Methods for fabrication of an air gap-containing interconnect structure
CLEVENGER LAWRENCE A13 citations83
US8896120B2Nov 25, 2014
Structures and methods for air gap integration
CLEVENGER LAWRENCE A4 citations72
US8183694B2May 22, 2012
Reversing tone of patterns on integrated circuit and nanoscale fabrication
CLEVENGER LAWRENCE A3 citations62
US8629561B2Jan 14, 2014
Air gap-containing interconnect structure having photo-patternable low k material
CLEVENGER LAWRENCE A0 citations51
IBM
4 patentsUS7470616B1Dec 30, 2008
Damascene wiring fabrication methods incorporating dielectric cap etch process with hard mask retention
IBM29 citations88
US8952539B2Feb 10, 2015
Methods for fabrication of an air gap-containing interconnect structure
IBM5 citations84
US7943480B2May 17, 2011
Sub-lithographic dimensioned air gap formation and related structure
IBM18 citations84
US7939446B1May 10, 2011
Process for reversing tone of patterns on integerated circuit and structural process for nanoscale fabrication
IBM16 citations83