P

Inventor

FURUSE MUNEO

JP13 patents
⚠️ This page may combine multiple inventors who share the name “FURUSE MUNEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

7 patents
US6875477B2Apr 5, 2005

Method for coating internal surface of plasma processing chamber

HITACHI HIGH TECH CORP411 citations98
US8006340B2Aug 30, 2011

Cleaning apparatus

HITACHI HIGH TECH CORP2 citations62
US6914005B2Jul 5, 2005

Plasma etching method

HITACHI HIGH TECH CORP6 citations60
US7526948B2May 5, 2009

Device and method for detecting foreign material on the surface of plasma processing apparatus

HITACHI HIGH TECH CORP1 citations52
US8024831B2Sep 27, 2011

Cleaning method

HITACHI HIGH TECH CORP0 citations51
US6837937B2Jan 4, 2005

Plasma processing apparatus

HITACHI HIGH TECH CORP0 citations51
US7052731B2May 30, 2006

Plasma processing apparatus, protecting layer therefor and installation of protecting layer

HITACHI HIGH TECH CORP1 citations48

HITACHI LTD

3 patents
US6158383ADec 12, 2000

Plasma processing method and apparatus

HITACHI LTD339 citations99
US5804033ASep 8, 1998

Microwave plasma processing method and apparatus

HITACHI LTD32 citations92
US5886473AMar 23, 1999

Surface wave plasma processing apparatus

HITACHI LTD14 citations74

HITCHI HIGH TECHNOLOGIES CORP

1 patent
US6796269B2Sep 28, 2004

Apparatus and method for monitoring plasma processing apparatus

HITCHI HIGH TECHNOLOGIES CORP15 citations80

OHASHI TOMOHIRO

1 patent
US8569177B2Oct 29, 2013

Plasma processing apparatus and plasma processing method

OHASHI TOMOHIRO3 citations60

HASHIMOTO TAKAHISA

1 patent
US8197704B2Jun 12, 2012

Plasma processing apparatus and method for operating the same

HASHIMOTO TAKAHISA2 citations59