Inventor
LIM SANGHAK
US3 patents
Patents
3 patentsUS8026035B2Sep 27, 2011
Etch-resistant disilane and saturated hydrocarbon bridged silicon-containing polymers, method of making the same, and method of using the same
CHEIL IND INC3 citations57
US8349985B2Jan 8, 2013
Boron-containing hydrogen silsesquioxane polymer, integrated circuit device formed using the same, and associated methods
CHEIL IND INC0 citations49
US8613979B2Dec 24, 2013
Boron-containing hydrogen silsesquioxane polymer, integrated circuit device formed using the same, and associated methods
CHEIL IND INC0 citations48