Inventor
HIRANO KAZUHIRO
JP11 patents
⚠️ This page may combine multiple inventors who share the name “HIRANO KAZUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
5 patentsUS5329336AJul 12, 1994
Exposure method and apparatus
NIKON CORP57 citations95
US7034474B2Apr 25, 2006
Auto-calibration of attraction-only type actuator commutations
NIKON CORP9 citations71
US7253576B2Aug 7, 2007
E/I core actuator commutation formula and control method
NIKON CORP3 citations60
US7366642B2Apr 29, 2008
Minimum force output control method for counter-mass with cable
NIKON CORP2 citations58
US10261419B2Apr 16, 2019
Magnet array for moving magnet planar motor
NIKON CORP0 citations34
YANG PAI-HSUEH
3 patentsUS8140288B2Mar 20, 2012
On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage
YANG PAI-HSUEH6 citations71
US9465305B2Oct 11, 2016
Method for determining a commutation offset and for determining a compensation map for a stage
YANG PAI-HSUEH3 citations70
US9013134B2Apr 21, 2015
Method for determing a commutation offset and for determining a compensation map for a stage
YANG PAI-HSUEH1 citations49