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Inventor

YANG HONG S

US11 patents
⚠️ This page may combine multiple inventors who share the name “YANG HONG S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

7 patents
US7018515B2Mar 28, 2006

Selectable dual position magnetron

APPLIED MATERIALS INC21 citations92
US7972469B2Jul 5, 2011

Plasma processing apparatus

APPLIED MATERIALS INC7 citations84
US7736473B2Jun 15, 2010

Magnetron having continuously variable radial position

APPLIED MATERIALS INC11 citations83
US7767064B2Aug 3, 2010

Position controlled dual magnetron

APPLIED MATERIALS INC10 citations82
US7186319B2Mar 6, 2007

Multi-track magnetron exhibiting more uniform deposition and reduced rotational asymmetry

APPLIED MATERIALS INC15 citations80
US11948784B2Apr 2, 2024

Tilted PVD source with rotating pedestal

APPLIED MATERIALS INC1 citations58
US7829456B2Nov 9, 2010

Method to modulate coverage of barrier and seed layer using titanium nitride

APPLIED MATERIALS INC1 citations51

HYUNDAI ELECTRONICS IND

1 patent
US5387539AFeb 7, 1995

Method of manufacturing trench isolation

HYUNDAI ELECTRONICS IND67 citations92

MILLER KEITH A

1 patent
US8685215B2Apr 1, 2014

Mechanism for continuously varying radial position of a magnetron

MILLER KEITH A5 citations82

ALLEN ADOLPH MILLER

1 patent
US8968536B2Mar 3, 2015

Sputtering target having increased life and sputtering uniformity

ALLEN ADOLPH MILLER3 citations56

YANG HONG S

1 patent
US8291626B2Oct 23, 2012

Iron with magnetic heel rest to prevent tipping

YANG HONG S2 citations55