Inventor
LU XINCHUN
CN7 patents
⚠️ This page may combine multiple inventors who share the name “LU XINCHUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LU XINCHUN
4 patentsUS9138857B2Sep 22, 2015
Chemical mechanical polishing machine and chemical mechanical polishing apparatus comprising the same
LU XINCHUN8 citations73
US8912790B2Dec 16, 2014
Measuring device for measuring film thickness of silicon wafer
LU XINCHUN2 citations54
US9377286B2Jun 28, 2016
Device for globally measuring thickness of metal film
LU XINCHUN0 citations33
US9255780B2Feb 9, 2016
Method for measuring thickness of film on wafer edge
LU XINCHUN0 citations33