Inventor
HE YONGYONG
CN3 patents
Patents
3 patentsUS9138857B2Sep 22, 2015
Chemical mechanical polishing machine and chemical mechanical polishing apparatus comprising the same
LU XINCHUN8 citations73
US9377286B2Jun 28, 2016
Device for globally measuring thickness of metal film
LU XINCHUN0 citations33
US9255780B2Feb 9, 2016
Method for measuring thickness of film on wafer edge
LU XINCHUN0 citations33