Inventor

SHEN PAN

CN3 patents

Patents

3 patents

US9138857B2Sep 22, 2015

Chemical mechanical polishing machine and chemical mechanical polishing apparatus comprising the same

LU XINCHUN8 citations73

US8912790B2Dec 16, 2014

Measuring device for measuring film thickness of silicon wafer

LU XINCHUN2 citations54

US9255780B2Feb 9, 2016

Method for measuring thickness of film on wafer edge

LU XINCHUN0 citations33