Inventor
DASH PRIYANKA
US4 patents
Patents
4 patentsUS9646876B2May 9, 2017
Aluminum nitride barrier layer
APPLIED MATERIALS INC9 citations83
US9659765B2May 23, 2017
Enhancement of modulus and hardness for UV-cured ultra low-k dielectric films
APPLIED MATERIALS INC3 citations71
US10600624B2Mar 24, 2020
System and method for substrate processing chambers
APPLIED MATERIALS INC5 citations70
US9793108B2Oct 17, 2017
Interconnect integration for sidewall pore seal and via cleanliness
APPLIED MATERIALS INC1 citations51