Inventor
ANAMOTO ATSUSHI
JP5 patents
Patents
5 patentsUS10573539B2Feb 25, 2020
Substrate liquid processing apparatus
TOKYO ELECTRON LTD6 citations71
US10591935B2Mar 17, 2020
Substrate liquid processing apparatus and substrate liquid processing method
TOKYO ELECTRON LTD3 citations70
US12427551B2Sep 30, 2025
Filter cleaning system and filter cleaning method
TOKYO ELECTRON LTD0 citations49
US10162371B2Dec 25, 2018
Substrate liquid processing apparatus and substrate liquid processing method
TOKYO ELECTRON LTD1 citations49
US12300518B2May 13, 2025
Substrate processing apparatus and substrate processing method having enhanced configuration of replenishing processing liquid
TOKYO ELECTRON LTD0 citations41