Inventor
FUJIMOTO YUU
JP5 patents
⚠️ This page may combine multiple inventors who share the name “FUJIMOTO YUU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON ANELVA CORP
3 patentsUS10062551B2Aug 28, 2018
Sputtering apparatus and substrate processing apparatus
CANON ANELVA CORP2 citations69
US9997339B2Jun 12, 2018
Sputtering apparatus and substrate processing apparatus
CANON ANELVA CORP2 citations69
US10615012B2Apr 7, 2020
Sputtering apparatus and substrate processing apparatus
CANON ANELVA CORP0 citations48