Inventor
SHIBAYAMA NOBUYUKI
JP18 patents
⚠️ This page may combine multiple inventors who share the name “SHIBAYAMA NOBUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
17 patentsUS11018034B2May 25, 2021
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD3 citations73
US10720333B2Jul 21, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD2 citations72
US10058900B2Aug 28, 2018
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD3 citations71
US9786527B2Oct 10, 2017
Substrate processing device and substrate processing method for carrying out chemical treatment for substrate
SCREEN HOLDINGS CO LTD2 citations71
US10002770B2Jun 19, 2018
Substrate processing device and substrate processing method for carrying out chemical treatment for substrate
SCREEN HOLDINGS CO LTD3 citations69
US11881419B2Jan 23, 2024
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations62
US11052432B2Jul 6, 2021
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations62
US10978317B2Apr 13, 2021
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations62
US11710629B2Jul 25, 2023
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations61
US11342190B2May 24, 2022
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations61
US11094529B2Aug 17, 2021
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations61
US11011398B2May 18, 2021
Fume determination method, substrate processing method, and substrate processing equipment
SCREEN HOLDINGS CO LTD0 citations61
US10854479B2Dec 1, 2020
Substrate processing method and substrate processing device
SCREEN HOLDINGS CO LTD1 citations59
US11217452B2Jan 4, 2022
Substrate processing device and substrate processing method for carrying out chemical treatment for substrate
SCREEN HOLDINGS CO LTD1 citations58
US10199231B2Feb 5, 2019
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations51
US11764055B2Sep 19, 2023
Substrate processing method and substrate processing device
SCREEN HOLDINGS CO LTD0 citations49
US10672627B2Jun 2, 2020
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations39