Inventor
CHANG CHIEN YING-HSUEH
TW6 patents
⚠️ This page may combine multiple inventors who share the name “CHANG CHIEN YING-HSUEH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
5 patentsUS11264321B2Mar 1, 2022
Semiconductor devices employing a barrier layer
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10510655B2Dec 17, 2019
Semiconductor devices employing a barrier layer
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US9764364B2Sep 19, 2017
Apparatus and methods for movable megasonic wafer probe
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9564509B2Feb 7, 2017
Method of fabricating an integrated circuit device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10507498B2Dec 17, 2019
Apparatus for particle cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations39