Inventor
TSAI JUNG-TSAN
TW6 patents
⚠️ This page may combine multiple inventors who share the name “TSAI JUNG-TSAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
5 patentsUS9576789B2Feb 21, 2017
Apparatus, method, and composition for far edge wafer cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US11705324B2Jul 18, 2023
Apparatus and method for wafer cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10998184B2May 4, 2021
Apparatus and method for wafer cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10325772B2Jun 18, 2019
Apparatus and method for wafer cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US12550624B2Feb 10, 2026
Semiconductor memory device and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47