Inventor
HARTLEY JOHN GEORGE
US6 patents
Patents
6 patentsUS5825039AOct 20, 1998
Digitally stepped deflection raster system and method of use thereof
IBM42 citations90
US5798528AAug 25, 1998
Correction of pattern dependent position errors in electron beam lithography
IBM28 citations90
US5773836AJun 30, 1998
Method for correcting placement errors in a lithography system
IBM49 citations90
US6177680B1Jan 23, 2001
Correction of pattern-dependent errors in a particle beam lithography system
IBM25 citations88
US6437347B1Aug 20, 2002
Target locking system for electron beam lithography
IBM15 citations82
US5917932AJun 29, 1999
System and method for evaluating image placement on pre-distorted masks
IBM13 citations71